High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region

	High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region
其他题名	论文其他题名
	Lin H.; Zhang L. C.; Li L. F.; Jin C. S.; Zhou H. J.; Huo T. L.
	2008
发表期刊	Optics Letters
ISSN	0146-9592
卷号	33 期号:5 页码:485-487
摘要	We describe a simple method to fabricate blazed gratings used in the extreme ultraviolet wavelength region. The method uses an argon and oxygen mixed-gas ion beam to directly etch the grating substrate through a rectangular profile photoresist grating mask. With this method the etched grating groove profile can be well controlled. An Mo/Si multilayer-coated specimen with a blaze angle of 1.9 degrees was fabricated and measured. At an incident angle of 10 degrees and a wavelength of 13.62 nm, the diffraction efficiency of the negative second order reaches 36.2%. (C) 2008 Optical Society of America.
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/26380
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Lin H.,Zhang L. C.,Li L. F.,et al. High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region[J]. Optics Letters,2008,33(5):485-487.
APA	Lin H.,Zhang L. C.,Li L. F.,Jin C. S.,Zhou H. J.,&Huo T. L..(2008).High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region.Optics Letters,33(5),485-487.
MLA	Lin H.,et al."High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region".Optics Letters 33.5(2008):485-487.

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