Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Annealing temperature dependent electrical and optical properties of ZnO and MgZnO films in hydrogen ambient | |
其他题名 | 论文其他题名 |
Liu W. W.; Yao B.; Li Y. F.; Li B. H.; Zheng C. J.; Zhang B. Y.; Shan C. X.; Zhang Z. Z.; Zhang J. Y.; Shen D. Z. | |
2009 | |
发表期刊 | Applied Surface Science
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ISSN | 0169-4332 |
卷号 | 255期号:13-14页码:6745-6749 |
摘要 | Un-doped ZnO and MgZnO thin films were deposited on c-plane sapphire substrates by molecular-beam epitaxy (MBE) and subsequently annealed in hydrogen ambient at 200-500 degrees C with a step of 100 degrees C. Hall-effect measurements show that annealing temperature has great effect on the electrical property of both ZnO and MgZnO films. The electron concentration of both ZnO and MgZnO films increases with annealing temperature ranging from 200 degrees C to 400 degrees C, and then decreases, which is attributed to incorporation of H into ZnO as a shallower donor during the annealing process and change of solid solubility of hydrogen in ZnO and MgZnO films with annealing temperature. The D(0)X emission is related to the hydrogen in MgZnO film and the donor level of the H is estimated to be 33.5 meV. It is also found that the controversial luminescence band at 3.310 eV can be formed in un-doped ZnO film upon annealing and its intensity increases with increasing annealing temperature, implying that this band may be not related to p-type doping. (C) 2009 Elsevier B.V. All rights reserved. |
收录类别 | SCI ; EI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/26242 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Liu W. W.,Yao B.,Li Y. F.,et al. Annealing temperature dependent electrical and optical properties of ZnO and MgZnO films in hydrogen ambient[J]. Applied Surface Science,2009,255(13-14):6745-6749. |
APA | Liu W. W..,Yao B..,Li Y. F..,Li B. H..,Zheng C. J..,...&Shen D. Z..(2009).Annealing temperature dependent electrical and optical properties of ZnO and MgZnO films in hydrogen ambient.Applied Surface Science,255(13-14),6745-6749. |
MLA | Liu W. W.,et al."Annealing temperature dependent electrical and optical properties of ZnO and MgZnO films in hydrogen ambient".Applied Surface Science 255.13-14(2009):6745-6749. |
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