CIOMP OpenIR  > 中科院长春光机所知识产出
High-aspect-ratio metal microchannel plates for microelectronic cooling applications
其他题名论文其他题名
Yu W.; Desmulliez M. P. Y.; Drufke A.; Leonard M.; Dhariwal R. S.; Flynn D.; Bognar G.; Poppe A.; Horvath G.; Kohari Z.; Rencz M.
2010
发表期刊Journal of Micromechanics and Microengineering
ISSN0960-1317
卷号20期号:2
摘要A new manufacturing process and the characterization of high-aspect-ratio metal microchannel plates for microelectronic cooling applications are reported in this article. A nickel-based microchannel cooling plate, with channels of width 20 mu m and aspect ratio up to 3.6:1, has been successfully fabricated using a modified UV-LIGA process. Similar metal microstructures, based on electroplated copper, have also been obtained with a width of 15 mu m and an aspect ratio of up to 5:1. In both cases, an over-plate technology was used to electroform the metallic microchannel plates in a single manufacturing step. Hydrodynamic and cooling characteristics of the microchannel plates such as flow rate and heat resistance have been measured. A heat transfer coefficient of 511 W m(-2) K(-1) for a flow rate of 120 l h(-1) has been obtained for the 20 mu m wide nickel-based microchannel.
收录类别SCI ; EI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/26203
专题中科院长春光机所知识产出
推荐引用方式
GB/T 7714
Yu W.,Desmulliez M. P. Y.,Drufke A.,et al. High-aspect-ratio metal microchannel plates for microelectronic cooling applications[J]. Journal of Micromechanics and Microengineering,2010,20(2).
APA Yu W..,Desmulliez M. P. Y..,Drufke A..,Leonard M..,Dhariwal R. S..,...&Rencz M..(2010).High-aspect-ratio metal microchannel plates for microelectronic cooling applications.Journal of Micromechanics and Microengineering,20(2).
MLA Yu W.,et al."High-aspect-ratio metal microchannel plates for microelectronic cooling applications".Journal of Micromechanics and Microengineering 20.2(2010).
条目包含的文件 下载所有文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Yu-2010-High-aspect-(1997KB) 开放获取--浏览 下载
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[Yu W.]的文章
[Desmulliez M. P. Y.]的文章
[Drufke A.]的文章
百度学术
百度学术中相似的文章
[Yu W.]的文章
[Desmulliez M. P. Y.]的文章
[Drufke A.]的文章
必应学术
必应学术中相似的文章
[Yu W.]的文章
[Desmulliez M. P. Y.]的文章
[Drufke A.]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Yu-2010-High-aspect-ratio me.pdf
格式: Adobe PDF
此文件暂不支持浏览
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。