Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Grazing emission X-ray fluorescence analysis for characteristics of film | |
其他题名 | 论文其他题名 |
Gong Y.; Chen B.; Ni Q. L.; Zhao H. Y.; Cao J. L. | |
2003 | |
发表期刊 | Spectroscopy and Spectral Analysis |
ISSN | 1000-0593 |
卷号 | 23期号:6页码:1199-1202 |
摘要 | Grazing emission X-ray fluorescence analysis is one of the important tools for the characterization of film in lab. In this paper, the principle and method are presented briefly for grazing emission X-ray fluorescence to analyze the thickness of the film. A set of equipment for film testing was set up in our laboratory, and its construction is described. The prototype setup is composed of a X-ray tube, a spectromenter and a gas-flow proportional counter with thin-film windows. The X-ray fluorescence produced by low Z element can be detected with this prototype setup. Meanwhile, the exit-angle dependence of the fluorescent X-ray intensity of some thin films with different thickness on Si substrates was demonstrated in theory, and the calculation results prove that the grazing emission X-ray fluorescence analysis is a good way to study the characteristics of film, such as the thickness of film. |
收录类别 | SCI |
语种 | 中文 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25832 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Gong Y.,Chen B.,Ni Q. L.,et al. Grazing emission X-ray fluorescence analysis for characteristics of film[J]. Spectroscopy and Spectral Analysis,2003,23(6):1199-1202. |
APA | Gong Y.,Chen B.,Ni Q. L.,Zhao H. Y.,&Cao J. L..(2003).Grazing emission X-ray fluorescence analysis for characteristics of film.Spectroscopy and Spectral Analysis,23(6),1199-1202. |
MLA | Gong Y.,et al."Grazing emission X-ray fluorescence analysis for characteristics of film".Spectroscopy and Spectral Analysis 23.6(2003):1199-1202. |
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