Experimental investigation of laser plasma soft X-ray source with gas target

	Experimental investigation of laser plasma soft X-ray source with gas target
其他题名	论文其他题名
	Ni Q. L.; Gong Y.; Lin J. Q.; Chen B.; Cao J. L.
	2003
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	23 期号:1 页码:101-103
摘要	This paper describes a debris-free laser plasma soft X-ray source with a gas target, which has high operating frequency and can produce strong soft X-ray radiation. The valve of this light source is drived by a piezoelectrical ceramic whose operating frequency is up to 400 Hz. In comparison with laser plasma soft X-ray sources using metal target, the light source is debris-free. And it has higher operating frequency than gas target soft X-ray sources whose nozzle is controlled by a solenoid valve. A channel electron multiplier (CEM) operating in analog mode is used to detect the soft X-ray generated by the laser plasma source, and the CEM's output is fed to to a charge-sensitive preamplifier for further amplification purpose. Output charges from the CEM are proportional to the amplitude of the preamplifier's output voltage. Spectra of CO2, Xe and Kr at 8-14 nm wavelength which can be used for soft X-ray projection lithography are measured. The spectrum for CO2 consists of separate spectral lines originate mainly from the transitions in Li-like and Be-like ions. The Xe spectrum originating mainly from 4d-5f, 4d-4f, 4d-6p and 4d-5p transitions in multiply charged xenon ions. The spectrum for Kr consists of separate spectral lines and continuous broad spectra originating mainly from the transitions in Cu-, Ni-, Co- and Fe-like ions.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25819
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Ni Q. L.,Gong Y.,Lin J. Q.,et al. Experimental investigation of laser plasma soft X-ray source with gas target[J]. Spectroscopy and Spectral Analysis,2003,23(1):101-103.
APA	Ni Q. L.,Gong Y.,Lin J. Q.,Chen B.,&Cao J. L..(2003).Experimental investigation of laser plasma soft X-ray source with gas target.Spectroscopy and Spectral Analysis,23(1),101-103.
MLA	Ni Q. L.,et al."Experimental investigation of laser plasma soft X-ray source with gas target".Spectroscopy and Spectral Analysis 23.1(2003):101-103.

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