Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Crystal structures and magnetic properties of Fe-N thin films deposited by dc magnetron sputtering | |
其他题名 | 论文其他题名 |
Zheng W. T.; Wang X.; Kong X. G.; Tian H. W.; Yu S. S.; Zhao Z. D.; Li X. T. | |
2004 | |
发表期刊 | Powder Diffraction |
ISSN | 0885-7156 |
卷号 | 19期号:4页码:352-355 |
摘要 | Fe-N thin films were deposited on glass substrates by dc magnetron sputtering under various Ar/N-2 discharge conditions. Crystal structures and elemental compositions of the films were characterized by X-ray diffraction and X-ray photoelectron spectroscopy. Magnetic properties of the films were measured using a superconducting quantum interference device magnetometer. Films deposited at different N-2/(Ar+N-2) flow ratios were found to have different crystal structures and different nitrogen contents. When the flow ratios were 60%, 50%, and 30%, a nonmagnetic single-phase FeN was formed in the films. At the flow ratio of 10%, two crystal phases of gamma'-Fe4N and epsilon-Fe3N were detected. When the flow ratio reduced to 5%, a mixture of alpha-Fe, epsilon-Fe3N, FeN0.056, and alpha"-Fe16N2 phases was obtained. The value of saturation magnetization for the mixture was found to be larger than that of pure Fe. (C) 2004 International Centre for Diffraction Data. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25815 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Zheng W. T.,Wang X.,Kong X. G.,et al. Crystal structures and magnetic properties of Fe-N thin films deposited by dc magnetron sputtering[J]. Powder Diffraction,2004,19(4):352-355. |
APA | Zheng W. T..,Wang X..,Kong X. G..,Tian H. W..,Yu S. S..,...&Li X. T..(2004).Crystal structures and magnetic properties of Fe-N thin films deposited by dc magnetron sputtering.Powder Diffraction,19(4),352-355. |
MLA | Zheng W. T.,et al."Crystal structures and magnetic properties of Fe-N thin films deposited by dc magnetron sputtering".Powder Diffraction 19.4(2004):352-355. |
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