Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Method of control of nitrogen content in ZnO films: Structural and photoluminescence properties | |
其他题名 | 论文其他题名 |
Ma J. G.; Liu Y. C.; Mu R.; Zhang J. Y.; Lu Y. M.; Shen D. Z.; Fan X. W. | |
2004 | |
发表期刊 | Journal of Vacuum Science & Technology B
![]() |
ISSN | 1071-1023 |
卷号 | 22期号:1页码:94-98 |
摘要 | In this article, nitrogen doped ZnO thin films with various nitrogen concentrations were obtained by thermal processing of zinc oxynitride alloy films prepared by radio frequency reactive magnetron sputtering. X-ray photoelectron spectroscopy study shows that varying the annealing temperature can modulate the concentration of nitrogen in ZnO. X-ray diffraction and Raman scattering measurements were employed to investigate the structural changes of ZnO films induced by the introduction of nitrogen. The results of the temperature-dependent photoluminescence measurements suggest that the optical properties of ZnO thin films are strongly influenced by nitrogen incorporation. With this technique, the binding energy of the nitrogen acceptor is also estimated. (C) 2004 American Vacuum Society. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25814 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Ma J. G.,Liu Y. C.,Mu R.,et al. Method of control of nitrogen content in ZnO films: Structural and photoluminescence properties[J]. Journal of Vacuum Science & Technology B,2004,22(1):94-98. |
APA | Ma J. G..,Liu Y. C..,Mu R..,Zhang J. Y..,Lu Y. M..,...&Fan X. W..(2004).Method of control of nitrogen content in ZnO films: Structural and photoluminescence properties.Journal of Vacuum Science & Technology B,22(1),94-98. |
MLA | Ma J. G.,et al."Method of control of nitrogen content in ZnO films: Structural and photoluminescence properties".Journal of Vacuum Science & Technology B 22.1(2004):94-98. |
条目包含的文件 | 下载所有文件 | |||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Ma-2004-Method of co(429KB) | 开放获取 | -- | 浏览 下载 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论