Method of control of nitrogen content in ZnO films: Structural and photoluminescence properties

	Method of control of nitrogen content in ZnO films: Structural and photoluminescence properties
其他题名	论文其他题名
	Ma J. G.; Liu Y. C.; Mu R.; Zhang J. Y.; Lu Y. M.; Shen D. Z.; Fan X. W.
	2004
发表期刊	Journal of Vacuum Science & Technology B
ISSN	1071-1023
卷号	22 期号:1 页码:94-98
摘要	In this article, nitrogen doped ZnO thin films with various nitrogen concentrations were obtained by thermal processing of zinc oxynitride alloy films prepared by radio frequency reactive magnetron sputtering. X-ray photoelectron spectroscopy study shows that varying the annealing temperature can modulate the concentration of nitrogen in ZnO. X-ray diffraction and Raman scattering measurements were employed to investigate the structural changes of ZnO films induced by the introduction of nitrogen. The results of the temperature-dependent photoluminescence measurements suggest that the optical properties of ZnO thin films are strongly influenced by nitrogen incorporation. With this technique, the binding energy of the nitrogen acceptor is also estimated. (C) 2004 American Vacuum Society.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25814
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Ma J. G.,Liu Y. C.,Mu R.,et al. Method of control of nitrogen content in ZnO films: Structural and photoluminescence properties[J]. Journal of Vacuum Science & Technology B,2004,22(1):94-98.
APA	Ma J. G..,Liu Y. C..,Mu R..,Zhang J. Y..,Lu Y. M..,...&Fan X. W..(2004).Method of control of nitrogen content in ZnO films: Structural and photoluminescence properties.Journal of Vacuum Science & Technology B,22(1),94-98.
MLA	Ma J. G.,et al."Method of control of nitrogen content in ZnO films: Structural and photoluminescence properties".Journal of Vacuum Science & Technology B 22.1(2004):94-98.

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