Development of soft X-ray and vacuum ultraviolet spectrum sources

	Development of soft X-ray and vacuum ultraviolet spectrum sources
其他题名	论文其他题名
	Chen B.; Ni Q. L.; Cao J. L.; Li F. T.; Chen X. D.
	2005
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	25 期号:3 页码:360-364
摘要	The soft X-ray and vacuum ultraviolet sources developed in CIOMP are presented. The wall-stabilized argon arc source with spectrum stability and repeatability of +/- 0.3 % is applied to the calibration of spectrum intensity distribution of the vacuum ultraviolet instruments as an absolute standard source. The Penning source, duobplasma source and hollow cathode source are able to produce atomic and ionic line spectra as a wavelength standard source, which covers a few nanometers to several tens nanometers with spectrum radiation stability and repeatability of +/- 1.0 %. In particular, the low debris laser produced plasma source with liquid aerosol spray target recently developed can emit stronger soft X-ray for soft X-ray lithography and metrology, which has a transfer efficiency as high as 0.75%/2 pi(.)pi/2% bandwidth.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25753
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Chen B.,Ni Q. L.,Cao J. L.,et al. Development of soft X-ray and vacuum ultraviolet spectrum sources[J]. Spectroscopy and Spectral Analysis,2005,25(3):360-364.
APA	Chen B.,Ni Q. L.,Cao J. L.,Li F. T.,&Chen X. D..(2005).Development of soft X-ray and vacuum ultraviolet spectrum sources.Spectroscopy and Spectral Analysis,25(3),360-364.
MLA	Chen B.,et al."Development of soft X-ray and vacuum ultraviolet spectrum sources".Spectroscopy and Spectral Analysis 25.3(2005):360-364.

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