Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Development of soft X-ray and vacuum ultraviolet spectrum sources | |
其他题名 | 论文其他题名 |
Chen B.; Ni Q. L.; Cao J. L.; Li F. T.; Chen X. D. | |
2005 | |
发表期刊 | Spectroscopy and Spectral Analysis
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ISSN | 1000-0593 |
卷号 | 25期号:3页码:360-364 |
摘要 | The soft X-ray and vacuum ultraviolet sources developed in CIOMP are presented. The wall-stabilized argon arc source with spectrum stability and repeatability of +/- 0.3 % is applied to the calibration of spectrum intensity distribution of the vacuum ultraviolet instruments as an absolute standard source. The Penning source, duobplasma source and hollow cathode source are able to produce atomic and ionic line spectra as a wavelength standard source, which covers a few nanometers to several tens nanometers with spectrum radiation stability and repeatability of +/- 1.0 %. In particular, the low debris laser produced plasma source with liquid aerosol spray target recently developed can emit stronger soft X-ray for soft X-ray lithography and metrology, which has a transfer efficiency as high as 0.75%/2 pi(.)pi/2% bandwidth. |
收录类别 | SCI |
语种 | 中文 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25753 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Chen B.,Ni Q. L.,Cao J. L.,et al. Development of soft X-ray and vacuum ultraviolet spectrum sources[J]. Spectroscopy and Spectral Analysis,2005,25(3):360-364. |
APA | Chen B.,Ni Q. L.,Cao J. L.,Li F. T.,&Chen X. D..(2005).Development of soft X-ray and vacuum ultraviolet spectrum sources.Spectroscopy and Spectral Analysis,25(3),360-364. |
MLA | Chen B.,et al."Development of soft X-ray and vacuum ultraviolet spectrum sources".Spectroscopy and Spectral Analysis 25.3(2005):360-364. |
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