Analytical method of the diffraction characteristic of ruled grating based on profile fitting function

	Analytical method of the diffraction characteristic of ruled grating based on profile fitting function
其他题名	论文其他题名
	Bayanheshig; Zhu H. C.
	2007
发表期刊	Acta Physica Sinica
ISSN	1000-3290
卷号	56 期号:7 页码:3893-3899
摘要	The diamond stylus extrudes the metal film and causes coupled elastic-plastic deformation which shapes the profile of the ruled grating. The grating profile function which is hard to get would influenced accurate analysis of the diffraction characteristic. An analytical method of the diffraction characteristic of the mechanically ruled grating is presented based on the profile fitting function. The problem of excessive departure between the measured and theoretical value of the diffraction efficiency of high density ruled grating is solved by this method. We take a 1200 l/mm UV grating, the grating profile is scanned in the principal section and then the profile curve function is got. The reason why the diffraction efficiency wasn't high is found by calculation. And then the diffraction efficiency increased about 20% by improving the technology.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25708
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Bayanheshig,Zhu H. C.. Analytical method of the diffraction characteristic of ruled grating based on profile fitting function[J]. Acta Physica Sinica,2007,56(7):3893-3899.
APA	Bayanheshig,&Zhu H. C..(2007).Analytical method of the diffraction characteristic of ruled grating based on profile fitting function.Acta Physica Sinica,56(7),3893-3899.
MLA	Bayanheshig,et al."Analytical method of the diffraction characteristic of ruled grating based on profile fitting function".Acta Physica Sinica 56.7(2007):3893-3899.

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