A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology

	A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology
其他题名	论文其他题名
	Hao P.; Wu Y. H.; Zhang P.; Liu Y. S.; Zhang K.; Li H. W.
	2009
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	29 期号:6 页码:1713-1716
摘要	A new mini-spectrophotometer was developed by, adopting micro-silicon slit and pixel segmentation technology, and this spectrophotometer used photoelectron diode array as the detector by the back-dividing-light way. At first, the effect of the spectral bandwidth on the tested absorbance linear correlation was analyzed. A theory for the design of spectrophotometer's slit was brought for-ward after discussing the relationships between spectrophotometer spectrum band width and pre-and post-slits width. Then, the integrative micro-silicon-slit, which features small volume, high precision, and thin thickness, was manufactured based on the MEMS technology. Finally, a test was carried on linear absorbance solution by this spectrophotometer. The final result showed that the correlation coefficients were larger than 0.999, which means that the new mini-spectrophotometer with micro-silicon slit pixel segmentation has an obvious linear correlation.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25667
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Hao P.,Wu Y. H.,Zhang P.,et al. A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology[J]. Spectroscopy and Spectral Analysis,2009,29(6):1713-1716.
APA	Hao P.,Wu Y. H.,Zhang P.,Liu Y. S.,Zhang K.,&Li H. W..(2009).A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology.Spectroscopy and Spectral Analysis,29(6),1713-1716.
MLA	Hao P.,et al."A Micro-Silicon Multi-Slit Spectrophotometer Based on MEMS Technology".Spectroscopy and Spectral Analysis 29.6(2009):1713-1716.

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