Measurement accuracy verification of aspheric surface test with computer-generated hologram

	Measurement accuracy verification of aspheric surface test with computer-generated hologram
其他题名	论文其他题名
	Liu H.
	2012
发表期刊	Chinese Optics Letters
ISSN	1671-7694
卷号	10 期号:7
摘要	A convex aspheric surface using a computer-generated hologram (CGH) test plate fabricated with novel techniques and equipment is tested. However, the measurement result is not verified via comparison with other methods. To verify the accuracy of the measurement, a perfect sphere surface is measured by the following. The measurement result is quantified into four parts: the figure error from the tested spherical surface; the figure error from the reference spherical surface; the error from the hologram; and the adjustment error from misalignment. The measurement result, removed from the later three errors, shows agreement to 4-nm RMS with the test by Zygo interfermeter of the same surface. Analysis of the CGH test showed the overall accuracy of the 4-nm RMS, with 3.9 nm from the test plate figure, 0.5 nm from the hologram, and 0.74 nm from other sources, such as random vibration, various second order effects, and so on. Thus, the measurement accuracy using the proposed CGH could be very high. CGH can therefore be used to measure aspheric surfaces accurately.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25560
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Liu H.. Measurement accuracy verification of aspheric surface test with computer-generated hologram[J]. Chinese Optics Letters,2012,10(7).
APA	Liu H..(2012).Measurement accuracy verification of aspheric surface test with computer-generated hologram.Chinese Optics Letters,10(7).
MLA	Liu H.."Measurement accuracy verification of aspheric surface test with computer-generated hologram".Chinese Optics Letters 10.7(2012).

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