Solving Resolution of Diffraction Gratings Using Coefficients of Zernike Polynomials

	Solving Resolution of Diffraction Gratings Using Coefficients of Zernike Polynomials
其他题名	论文其他题名
	Yu H. L.; Qi X. D.; Bayanheshig; Tang Y. G.
	2012
发表期刊	Spectroscopy and Spectral Analysis
ISSN	1000-0593
卷号	32 期号:1 页码:264-267
摘要	It is hard and costly to test resolution directly, because the focal length of testing equipment could be nearly ten meters. Solving resolution by diffraction wavefront aberration indirectly is an effective solution to this problem. A normalization model of solving resolution using fitting coefficients of Zernike polynomials was established based on the spectral imaging theory of Fourier optics. The relationship between resolution and wavefront aberration of diffraction gratings was illustrated by this model. Finally, a new method of testing resolution using fitting coefficients of Zernike polynomials was proposed. According to this method, the resolution of a grating is tested by ZYGO interferometer indirectly. Compared with direct method, results indicate that the error of indirect method is less than 4. 22%, and this method could be an effective way to avoid the difficulty of direct method to solve resolution. Meanwhile, this method can be used in ZYGO interferometer to solve resolution by wavefront testing easily.
收录类别	SCI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25533
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Yu H. L.,Qi X. D.,Bayanheshig,et al. Solving Resolution of Diffraction Gratings Using Coefficients of Zernike Polynomials[J]. Spectroscopy and Spectral Analysis,2012,32(1):264-267.
APA	Yu H. L.,Qi X. D.,Bayanheshig,&Tang Y. G..(2012).Solving Resolution of Diffraction Gratings Using Coefficients of Zernike Polynomials.Spectroscopy and Spectral Analysis,32(1),264-267.
MLA	Yu H. L.,et al."Solving Resolution of Diffraction Gratings Using Coefficients of Zernike Polynomials".Spectroscopy and Spectral Analysis 32.1(2012):264-267.

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