Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft X-ray and EUV regions

	Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft X-ray and EUV regions
其他题名	论文其他题名
	Michette A. G.; Wang Z. S.
	2000
发表期刊	Optics Communications
ISSN	0030-4018
卷号	177 期号:1—6 页码:47-55
摘要	A systematic method which allows the optimum thickness of each layer in a depth-graded multilayer coating to be determined is described. This enables specific reflectivity responses over broad wavelength bands in the soft X-ray and EUV regions to be calculated. The method is applied to the design of some depth-graded molybdenum/silicon multilayers for the wavelength range 13-19 nm, with average normal incidence reflectivities of about 13% in this range, but it is generally applicable for other material pairs and wavelength ranges. In addition, the effects of layer thickness errors on the performance of depth-graded multilayers can be simulated. The model gives better results than those based on power law variation of the layer thicknesses. (C) 2000 Elsevier Science B.V. All rights reserved.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25285
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Michette A. G.,Wang Z. S.. Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft X-ray and EUV regions[J]. Optics Communications,2000,177(1—6):47-55.
APA	Michette A. G.,&Wang Z. S..(2000).Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft X-ray and EUV regions.Optics Communications,177(1—6),47-55.
MLA	Michette A. G.,et al."Optimisation of depth-graded multilayer coatings for broadband reflectivity in the soft X-ray and EUV regions".Optics Communications 177.1—6(2000):47-55.

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