Lithographic fabrication of large diffractive optical elements on a concave lens surface

	Lithographic fabrication of large diffractive optical elements on a concave lens surface
其他题名	论文其他题名
	Xie Y. J.; Lu Z. Q. A.; Li F. Y.; Zhao J. L.; Weng Z. C.
	2002
发表期刊	Optics Express
ISSN	1094-4087
卷号	10 期号:20 页码:1043-1047
摘要	We demonstrate experimentally the lithography technique to fabricate a large computer-generated diffractive optical element (DOE) pattern on a concave lens surface with precise alignment by using a laser direct writer. We obtained photoresist film with uniform thickness on the large concave substrate by selecting proper spin-coating parameters, which mainly involve spin rate, spin acceleration, and viscosity of the photoresist. We obtained a square line profile on the concave lens surface. We can write lines that range in width from 0.7 to 10 mum using a single pass of the laser beam. We have designed and fabricated a grating on the concave lens surface using the laser direct writing lithography technique. It is believed that this technique can also transfer large DOE patterns, with a continuous surface relief, onto a convex or concave lens (mirror) surface. (C) 2002 Optical Society of America.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25184
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xie Y. J.,Lu Z. Q. A.,Li F. Y.,et al. Lithographic fabrication of large diffractive optical elements on a concave lens surface[J]. Optics Express,2002,10(20):1043-1047.
APA	Xie Y. J.,Lu Z. Q. A.,Li F. Y.,Zhao J. L.,&Weng Z. C..(2002).Lithographic fabrication of large diffractive optical elements on a concave lens surface.Optics Express,10(20),1043-1047.
MLA	Xie Y. J.,et al."Lithographic fabrication of large diffractive optical elements on a concave lens surface".Optics Express 10.20(2002):1043-1047.

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