Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Lithographic fabrication of large diffractive optical elements on a concave lens surface | |
其他题名 | 论文其他题名 |
Xie Y. J.; Lu Z. Q. A.; Li F. Y.; Zhao J. L.; Weng Z. C. | |
2002 | |
发表期刊 | Optics Express
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ISSN | 1094-4087 |
卷号 | 10期号:20页码:1043-1047 |
摘要 | We demonstrate experimentally the lithography technique to fabricate a large computer-generated diffractive optical element (DOE) pattern on a concave lens surface with precise alignment by using a laser direct writer. We obtained photoresist film with uniform thickness on the large concave substrate by selecting proper spin-coating parameters, which mainly involve spin rate, spin acceleration, and viscosity of the photoresist. We obtained a square line profile on the concave lens surface. We can write lines that range in width from 0.7 to 10 mum using a single pass of the laser beam. We have designed and fabricated a grating on the concave lens surface using the laser direct writing lithography technique. It is believed that this technique can also transfer large DOE patterns, with a continuous surface relief, onto a convex or concave lens (mirror) surface. (C) 2002 Optical Society of America. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25184 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Xie Y. J.,Lu Z. Q. A.,Li F. Y.,et al. Lithographic fabrication of large diffractive optical elements on a concave lens surface[J]. Optics Express,2002,10(20):1043-1047. |
APA | Xie Y. J.,Lu Z. Q. A.,Li F. Y.,Zhao J. L.,&Weng Z. C..(2002).Lithographic fabrication of large diffractive optical elements on a concave lens surface.Optics Express,10(20),1043-1047. |
MLA | Xie Y. J.,et al."Lithographic fabrication of large diffractive optical elements on a concave lens surface".Optics Express 10.20(2002):1043-1047. |
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