Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Fabrication of large diffractive optical elements in thick film on a concave lens surface | |
其他题名 | 论文其他题名 |
Xie Y. J.; Lu Z. W.; Li F. Y. | |
2003 | |
发表期刊 | Optics Express |
ISSN | 1094-4087 |
卷号 | 11期号:9页码:992-995 |
摘要 | We demonstrate experimentally the technique of fabricating large diffractive optical elements (DOEs) in thick film on a concave lens surface ( mirrors) with precise alignment by using the strategy of double exposure. We adopt the method of double exposure to overcome the difficulty of processing thick photoresist on a large curved substrate. A uniform thick film with arbitrary thickness on a concave lens can be obtained with this technique. We fabricate a large concentric circular grating with a 10-mum period on a concave lens surface in film with a thickness of 2.0 mum after development. It is believed that this technique can also be used to fabricate larger DOEs in thicker film on the concave or convex lens surface with precise alignment. There are other potential applications of this technique, such as fabrication of micro-optoelectromechanical systems (MOEMS) or microelectromechanical systems (MEMS) and fabrication of microlens arrays on a large concave lens surface or convex lens surface with precise alignment. (C) 2003 Optical Society of America. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/25120 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Xie Y. J.,Lu Z. W.,Li F. Y.. Fabrication of large diffractive optical elements in thick film on a concave lens surface[J]. Optics Express,2003,11(9):992-995. |
APA | Xie Y. J.,Lu Z. W.,&Li F. Y..(2003).Fabrication of large diffractive optical elements in thick film on a concave lens surface.Optics Express,11(9),992-995. |
MLA | Xie Y. J.,et al."Fabrication of large diffractive optical elements in thick film on a concave lens surface".Optics Express 11.9(2003):992-995. |
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