Fabrication of large diffractive optical elements in thick film on a concave lens surface

	Fabrication of large diffractive optical elements in thick film on a concave lens surface
其他题名	论文其他题名
	Xie Y. J.; Lu Z. W.; Li F. Y.
	2003
发表期刊	Optics Express
ISSN	1094-4087
卷号	11 期号:9 页码:992-995
摘要	We demonstrate experimentally the technique of fabricating large diffractive optical elements (DOEs) in thick film on a concave lens surface ( mirrors) with precise alignment by using the strategy of double exposure. We adopt the method of double exposure to overcome the difficulty of processing thick photoresist on a large curved substrate. A uniform thick film with arbitrary thickness on a concave lens can be obtained with this technique. We fabricate a large concentric circular grating with a 10-mum period on a concave lens surface in film with a thickness of 2.0 mum after development. It is believed that this technique can also be used to fabricate larger DOEs in thicker film on the concave or convex lens surface with precise alignment. There are other potential applications of this technique, such as fabrication of micro-optoelectromechanical systems (MOEMS) or microelectromechanical systems (MEMS) and fabrication of microlens arrays on a large concave lens surface or convex lens surface with precise alignment. (C) 2003 Optical Society of America.
收录类别	SCI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/25120
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Xie Y. J.,Lu Z. W.,Li F. Y.. Fabrication of large diffractive optical elements in thick film on a concave lens surface[J]. Optics Express,2003,11(9):992-995.
APA	Xie Y. J.,Lu Z. W.,&Li F. Y..(2003).Fabrication of large diffractive optical elements in thick film on a concave lens surface.Optics Express,11(9),992-995.
MLA	Xie Y. J.,et al."Fabrication of large diffractive optical elements in thick film on a concave lens surface".Optics Express 11.9(2003):992-995.

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