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A high-accuracy and convenient figure measurement system for large convex lens
其他题名论文其他题名
Tian Z. H.; Yang W.; Sui Y. X.; Kang Y. S.; Liu W. Q.; Yang H. J.
2012
发表期刊Optics Express
ISSN1094-4087
卷号20期号:10页码:10761-10775
摘要We present a novel optical configuration of a phase-shifting interferometer for high-accuracy figure metrology of large dioptric convex spherical surfaces. The conformation and design considerations according to measurement accuracy, practicability, and system errors analysis are described. More in detail, we show the design principle and methods for the crucial parts. Some are expounded upon with examples for thorough understanding. The measurement procedures and the alignment approaches are also described. Finally, a verification experiment is further presented to verify our theoretical design. This system gives full-aperture and high-precision surface testing while maintaining relatively low cost and convenient operation. (C) 2012 Optical Society of America
收录类别SCI
语种英语
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/24598
专题中科院长春光机所知识产出
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Tian Z. H.,Yang W.,Sui Y. X.,et al. A high-accuracy and convenient figure measurement system for large convex lens[J]. Optics Express,2012,20(10):10761-10775.
APA Tian Z. H.,Yang W.,Sui Y. X.,Kang Y. S.,Liu W. Q.,&Yang H. J..(2012).A high-accuracy and convenient figure measurement system for large convex lens.Optics Express,20(10),10761-10775.
MLA Tian Z. H.,et al."A high-accuracy and convenient figure measurement system for large convex lens".Optics Express 20.10(2012):10761-10775.
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