Changchun Institute of Optics,Fine Mechanics and Physics,CAS
A high-accuracy and convenient figure measurement system for large convex lens | |
其他题名 | 论文其他题名 |
Tian Z. H.; Yang W.; Sui Y. X.; Kang Y. S.; Liu W. Q.; Yang H. J. | |
2012 | |
发表期刊 | Optics Express
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ISSN | 1094-4087 |
卷号 | 20期号:10页码:10761-10775 |
摘要 | We present a novel optical configuration of a phase-shifting interferometer for high-accuracy figure metrology of large dioptric convex spherical surfaces. The conformation and design considerations according to measurement accuracy, practicability, and system errors analysis are described. More in detail, we show the design principle and methods for the crucial parts. Some are expounded upon with examples for thorough understanding. The measurement procedures and the alignment approaches are also described. Finally, a verification experiment is further presented to verify our theoretical design. This system gives full-aperture and high-precision surface testing while maintaining relatively low cost and convenient operation. (C) 2012 Optical Society of America |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/24598 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Tian Z. H.,Yang W.,Sui Y. X.,et al. A high-accuracy and convenient figure measurement system for large convex lens[J]. Optics Express,2012,20(10):10761-10775. |
APA | Tian Z. H.,Yang W.,Sui Y. X.,Kang Y. S.,Liu W. Q.,&Yang H. J..(2012).A high-accuracy and convenient figure measurement system for large convex lens.Optics Express,20(10),10761-10775. |
MLA | Tian Z. H.,et al."A high-accuracy and convenient figure measurement system for large convex lens".Optics Express 20.10(2012):10761-10775. |
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