Precise lens support and adjustment technology for DUV lithographic projection objective

	Precise lens support and adjustment technology for DUV lithographic projection objective
其他题名	论文其他题名
	Ni M.Y.; Gong Y.
	2011
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	19 期号:7 SUPPL.页码:390-399
摘要	Based on the top three projection objective manufacturing companies' lens supporting and adjustment structures, the article presents a full description to the principles and traits of this technology. An analysis of the core technology for super precise flexural kinematic support and the positioning barrel used in recent projection objectives is carried out. The key technology of multi-axis adjustment and parasitic error elimination by way of parallel adjustment is emphasized. We set up Finite Element Analysis(FEA) models of different supporting methods, such as a barrel with elastic linkage between inner and outer holders, a multi-elastic member supporting holder and kinematic supporting structure. The lens surface figure of different supporting methods, the self-weight and temperature variation has been analyzed. The calculation results indicate that the surface RMS value of the multi-elastic member supporting holder is less than 1.9 nm with a 0.5C temperature rise and the surface RMS value for the kinematic supporting structure is less than 1.8 nm with a 0.5C temperature rise, both of which show good performance for temperature compensation. A kinematic supporting structure is much more convenient for lens assembly and adjustment and eliminates the vice effect of glue. Finally, the emerging trends in research of lens support and adjustment structures in the projection objective are summarized and discussed. With emphasis on monolithic parallel support and adjustment technology, a flexural kinematic support and positioning barrel has already been pointed out in the field of lithography.
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/24453
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Ni M.Y.,Gong Y.. Precise lens support and adjustment technology for DUV lithographic projection objective[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2011,19(7 SUPPL.):390-399.
APA	Ni M.Y.,&Gong Y..(2011).Precise lens support and adjustment technology for DUV lithographic projection objective.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,19(7 SUPPL.),390-399.
MLA	Ni M.Y.,et al."Precise lens support and adjustment technology for DUV lithographic projection objective".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 19.7 SUPPL.(2011):390-399.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
基于光学定心加工的道威棱镜装配方法.kd（1387KB）			开放获取	--	浏览下载