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Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography 期刊论文
Photonic Sensors, 2019, 卷号: 9, 期号: 4, 页码: 344-355
作者:  Y.Song;  Bayanheshig;  S.Li;  S.Jiang;  W.Wang
Adobe PDF(3307Kb)  |  收藏  |  浏览/下载：168/63  |  提交时间：2020/08/24
Piecewise linear weighted iterative algorithm,beam alignment,scanning,beam interference lithography (SBIL),overshoot suppression,convergence,speed,femtosecond laser,fabrication,gratings,crystal,system,Instruments & Instrumentation,Optics  
Analysis and correction of the distortion error in a DMD based scanning lithography system 期刊论文
Optics Communications, 2019, 卷号: 434, 页码: 1-6
作者:  Q.K.Li;  Y.Xiao;  H.Liu;  H.L.Zhang;  J.Xu;  J.H.Li
Adobe PDF(1598Kb)  |  收藏  |  浏览/下载：186/38  |  提交时间：2020/08/24
Microlithography,Lithography,Digital image processing,maskless lithography,fabrication,Optics  
Modeling multilayer coating profiles with defects on EUV collector with grating 期刊论文
Optical Engineering, 2019, 卷号: 58, 期号: 10, 页码: 9
作者:  S.Z.Sun;  C.S.Jin;  B.Yu;  T.Guo;  S.Yao;  W.Y.Deng;  C.Li
Adobe PDF(1912Kb)  |  收藏  |  浏览/下载：109/34  |  提交时间：2020/08/24
EUV collector with grating,multilayer coating profile,coating defects,deposition model,EUV reflectance,lithography,Optics  
Quality evaluation of solar magnetic field images at EUV wavelengths in digital image correlation method 期刊论文
Journal of Computational Methods in Sciences and Engineering, 2019, 卷号: 19, 期号: 4, 页码: 1109-1123
作者:  Y.Liu;  K.-F.Song;  J.-L.Ma;  X.-D.Wang;  Z.-W.Han
Adobe PDF(8287Kb)  |  收藏  |  浏览/下载：107/28  |  提交时间：2020/08/24
Image quality,Displacement measurement,Extreme ultraviolet lithography,Image analysis,Magnetic fields,Quality control,Strain measurement  
A beam homogenizer for digital micromirror device lithography system based on random freeform microlenses 期刊论文
Optics Communications, 2019, 卷号: 443, 页码: 211-215
作者:  Z.Y.Liu;  H.Liu;  Z.F.Lu;  Q.K.Li;  J.H.Li
Adobe PDF(1582Kb)  |  收藏  |  浏览/下载：140/58  |  提交时间：2020/08/24
Homogenizer,Microlens array,Freeform surface,DMD lithography system,laser,optics  
Formation of controllable 1D and 2D periodic surface structures on cobalt by femtosecond double pulse laser irradiation 期刊论文
Applied Physics Letters, 2019, 卷号: 115, 期号: 3, 页码: 5
作者:  S.A.Jalil;  J.J.Yang;  M.ElKabbash;  C.Cong;  C.L.Guo
Adobe PDF(2301Kb)  |  收藏  |  浏览/下载：128/45  |  提交时间：2020/08/24
large-area,semiconductors,lithography,dynamics,ablation,Physics  
Maskless formation of uniform subwavelength periodic surface structures by double temporally-delayed femtosecond laser beams 期刊论文
Applied Surface Science, 2019, 卷号: 471, 页码: 516-520
作者:  S.A.Jalil;  J.J.Yang;  M.ElKabbash;  S.C.Singh;  C.L.Guo
Adobe PDF(1863Kb)  |  收藏  |  浏览/下载：167/55  |  提交时间：2020/08/24
Laser-matter interaction,Nanostructures,FLIPSSs,Ultrafast phenomenon,Surface plasmon,Nanofabrication,lithography  
Micro-textures inversely designed with overlayed-lithography manufacturability for wetting behavior in CassieBaxter status 期刊论文
Applied Mathematical Modelling, 2019, 卷号: 74, 页码: 621-640
作者:  Y.Deng;  Z.Liu;  Y.Wang;  H.Duan;  J.G.Korvink
Adobe PDF(4621Kb)  |  收藏  |  浏览/下载：151/58  |  提交时间：2020/08/24
Lithography,Aspect ratio,Design,Extrusion,Liquids  
Structurally tunable plasmonic absorption bands in a self-assembled nano-hole array 期刊论文
NANOSCALE, 2018, 卷号: 10, 期号: 40, 页码: 19117-19124
作者:  Li, Qiang;  Li, Zizheng;  Wang, Xiaoyi;  Wang, Tongtong;  Liu, Hai;  Yang, Haigui;  Gong, Yan;  Gao, Jinsong
Adobe PDF(3091Kb)  |  收藏  |  浏览/下载：333/103  |  提交时间：2019/08/26
extraordinary optical-transmission  enhanced raman-scattering  surface-plasmons  wave-guide  thin  nanostructures  photodetection  metamaterials  lithography  excitation  Chemistry  Science & Technology - Other Topics  Materials Science  Physics  
Refined grating fabrication using Displacement Talbot Lithography 期刊论文
Microelectronic Engineering, 2018, 卷号: 189, 页码: 74-77
作者:  Chen, H.;  Qin, L.;  Chen, Y. Y.;  Jia, P.;  Gao, F.;  Chen, C.;  Liang, L.;  Zhang, X.;  Lou, H. W.;  Ning, Y. Q.;  Wang, L. J.
Adobe PDF(758Kb)  |  收藏  |  浏览/下载：434/130  |  提交时间：2019/09/17
Refined grating fabrication  Displacement Talbot Lithography  Phase  shift mask  Photolighography  interferometric lithography  grids  Engineering  Science & Technology - Other Topics  Optics  Physics