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High precision angular displacement measurement based on self-correcting error compensation of three image sensors 期刊论文
Applied Optics, 2022, 卷号: 61, 期号: 1, 页码: 287-293
作者:  H. Yu;  Q. H. Wan;  X. R. Lu;  C. H. Zhao and L. H. Liang
Adobe PDF(11700Kb)  |  收藏  |  浏览/下载:138/34  |  提交时间:2022/06/13
High-precision displacement measurement algorithm based on a depth fusion of grating projection pattern 期刊论文
Applied Optics, 2022, 卷号: 61, 期号: 4, 页码: 1049-1056
作者:  H. Yu;  Q. H. Wan;  X. R. Lu;  Y. C. Du and L. H. Liang
Adobe PDF(6289Kb)  |  收藏  |  浏览/下载:89/45  |  提交时间:2023/06/14
Apparatus and its principle for thermal aberration compensation 期刊论文
Applied Optics, 2022, 卷号: 61, 期号: 29, 页码: 8624-8632
作者:  X. F. Yu;  H. J. Yang and M. Y. Ni
Adobe PDF(16982Kb)  |  收藏  |  浏览/下载:65/29  |  提交时间:2023/06/14
40x zoom optical system design based on stable imaging principle of four groups 期刊论文
Applied Optics, 2022, 卷号: 61, 期号: 6, 页码: 1516-1522
作者:  K. Zhang;  Z. Qu;  X. Zhong;  F. X. Li and S. Y. Yu
Adobe PDF(8534Kb)  |  收藏  |  浏览/下载:84/46  |  提交时间:2023/06/14
Design method for an off-axis reflective anamorphic optical system with aberration balance and constraint control 期刊论文
Applied Optics, 2021, 卷号: 60, 期号: 16, 页码: 4557-4566
作者:  Y. Wu;  L. Wang;  X. Zhang;  J. Yu;  B. Yu and C. Jin
Adobe PDF(8010Kb)  |  收藏  |  浏览/下载:85/35  |  提交时间:2022/06/13
Anti-stain algorithm of angular displacement based on a single image sensor 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 7, 页码: 1985-1990
作者:  H. Yu, Q. H. Wan, C. H. Zhao, X. R. Lu and Y. Sun
Adobe PDF(824Kb)  |  收藏  |  浏览/下载:113/40  |  提交时间:2021/07/06
Numerical calculation of the mosaic error between mosaic gratings 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 13, 页码: 4048-4054
作者:  G. J. Yang,X. D. Qi,X. T. Mi,S. W. Zhang,H. Z. Yu,H. L. Yu,X. T. Li and S. Yang
Adobe PDF(1151Kb)  |  收藏  |  浏览/下载:112/35  |  提交时间:2021/07/06
Effect of the measuring mirror surface shape error on ruled groove straightness and the grating diffraction wavefront 期刊论文
Applied Optics, 2020, 卷号: 59, 期号: 27, 页码: 8465-8471
作者:  X. T. Mi,S. W. Zhang,X. D. Qi,H. L. Yu,H. Z. Yu,S. B. Jiang,Y. Lin,J. X. Zhou and Y. Y. Sun
Adobe PDF(2466Kb)  |  收藏  |  浏览/下载:92/37  |  提交时间:2021/07/06
Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance 期刊论文
Applied Optics, 2018, 卷号: 57, 期号: 35, 页码: 10146-10151
作者:  Mi, X. T.;  Zhang, S. W.;  Yu, H. Z.;  Yu, H. L.;  Cong, M.;  Qi, X. D.
Adobe PDF(877Kb)  |  收藏  |  浏览/下载:232/90  |  提交时间:2019/09/17
interferometric control  echelle gratings  resolution  carriage  Optics  
Active lens for thermal aberration compensation in lithography lens 期刊论文
Applied Optics, 2018, 卷号: 57, 期号: 29, 页码: 8654-8663
作者:  Zhao, L.;  Dong, L. J.;  Yu, X. F.;  Li, P. Z.;  Qiao, Y. F.
Adobe PDF(2985Kb)  |  收藏  |  浏览/下载:297/100  |  提交时间:2019/09/17
adaptive optics  deformable mirror  performance  simulation  systems  design  Optics