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Active control technology of a diffraction grating wavefront by scanning beam interference lithography 期刊论文
Optics Express, 2021, 卷号: 29, 期号: 23, 页码: 5
作者:  Z. Liu;  H. Yang;  Y. Li;  S. Jiang;  W. Wang;  Y. Song and L. W
浏览  |  Adobe PDF(2880Kb)  |  收藏  |  浏览/下载：81/37  |  提交时间：2022/06/13
Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model 期刊论文
Optics Express, 2017, 卷号: 25, 期号: 9
作者:  Liu, Z. W.;  S. Jiang;  X. T. Li;  Y. Song;  W. H. Li and Bayanheshig
浏览  |  Adobe PDF(3322Kb)  |  收藏  |  浏览/下载：275/82  |  提交时间：2018/06/13