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Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography 期刊论文
Applied Surface Science, 2017, 卷号: 425
作者:  Xue, C. F.;  J. Zhao;  Y. Q. Wu;  H. N. Yu;  S. M. Yang;  L. S. Wang;  W. C. Zhao;  Q. Wu;  Z. C. Zhu;  B. Liu;  X. Zhang;  W. C. Zhou and R. Z. Tai
Adobe PDF(1187Kb)  |  收藏  |  浏览/下载：338/95  |  提交时间：2018/06/13
An improved accuracy-measuring method in manufacturing the lead screw of grating ruling engine 期刊论文
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 2017, 卷号: 49
作者:  Yao, X. F.;  J. C. Cui;  H. L. Yu;  X. D. Qi;  X. T. Mi;  Y. M. Jiang;  M. J. Wang and X. T. Li
Adobe PDF(3285Kb)  |  收藏  |  浏览/下载：332/75  |  提交时间：2018/06/13
Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
Adobe PDF(1006Kb)  |  收藏  |  浏览/下载：288/103  |  提交时间：2018/06/13