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中国科学院长春光学精密机械与物理研究所
Changchun Institute of Optics,Fine Mechanics and Physics,CAS
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2022 [1]
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光学精密工程 [1]
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基于粒子群优化的宏观傅里叶叠层成像位置失配校准
期刊论文
光学精密工程, 2022, 卷号: 30, 期号: 23, 页码: 2975-2986
Authors:
何承刚
;
朱友强
;
王斌
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Submit date：2023/05/18
