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Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2395-2406
Authors:  Kuang, Shang-Qi;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
View  |  Adobe PDF(985Kb)  |  Favorite  |  View/Download:11/4  |  Submit date:2019/09/17
Multilayers  Extreme ultraviolet lithography  Fabrication  Mirrors  Reflection