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An investigation on the removal characteristics of compound materials during ion beam sputtering using the Kinetic Monte Carlo method 期刊论文
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms, 2014, 期号: 323, 页码: 1-6
作者:  Liang X.;  Wang X.;  Miao E. L.;  Zheng J. J.;  Wang F.;  Wang G. W.;  Gu Y. Q.
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