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Trajectory-fitting and testing error analysis of stage for curved grating etching 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 3, 页码: 588-596
作者:  Shen, Chen;  Tan, Xin;  Zhu, Ji-Wei;  Zhang, Wei;  Qi, Xiang-Dong
浏览  |  Adobe PDF(1093Kb)  |  收藏  |  浏览/下载：242/115  |  提交时间：2019/09/17
Curve fitting  Diffraction gratings  Errors  Etching  
Online detection of profile deviation for nano precision 2-D stage mirror 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 9
作者:  Liu, Z.-W.;  W.-H. Li;  J.-K. Wang;  S. Jiang;  Y. Song;  M.-Z. Pan and Bayanheshig
Adobe PDF(624Kb)  |  收藏  |  浏览/下载：303/85  |  提交时间：2017/09/11
Yaw angle correction of grating line based on single piezoelectric actuator 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 8, 页码: 2039-2046
作者:  Li X.-T.;  Qi X.-D.;  Yu H.-L.;  Gao J.-X.;  Feng S.-L.;  Bayanheshig
Adobe PDF(1572Kb)  |  收藏  |  浏览/下载：298/79  |  提交时间：2015/04/24
Mechanism of frictional chatter during mechanical ruling grating 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 11, 页码: 3061-3066
作者:  Shi G.-F.;  L Y.-Y.;  Shi G.-Q.;  Jiri G.;  Xiao W.
Adobe PDF(1426Kb)  |  收藏  |  浏览/下载：262/73  |  提交时间：2015/04/24
Influence of running accuracy of ruling carriage system on grating spectrum performance 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 10, 页码: 2674-2682
作者:  Yang C.;  Yu H.-L.;  Feng S.-L.;  Li X.-T.;  Qi X.-D.;  Jiang S.;  Tang Y.-G.
Adobe PDF(1639Kb)  |  收藏  |  浏览/下载：326/114  |  提交时间：2015/04/24