中文版 | English

在结果中检索

CIOMP OpenIR

浏览/检索结果: 共17条，第1-10条 帮助

限定条件    
已选(0)清除 条数/页：   排序方式：
Overview of 2D grating displacement measurement technology 期刊论文
Chinese Optics, 2020, 卷号: 13, 期号: 6, 页码: 1224-1238
作者:  Y.-F. Yin,Z.-W. Liu,J. Jirigalantu,H.-Z. Yu,W. Wang,X.-T. Li,H. Bao,W.-H. Li and Q. Hao
Adobe PDF(6951Kb)  |  收藏  |  浏览/下载：74/23  |  提交时间：2021/07/06
Trajectory-fitting and testing error analysis of stage for curved grating etching 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 3, 页码: 588-596
作者:  Shen, Chen;  Tan, Xin;  Zhu, Ji-Wei;  Zhang, Wei;  Qi, Xiang-Dong
Adobe PDF(1093Kb)  |  收藏  |  浏览/下载：242/115  |  提交时间：2019/09/17
Curve fitting  Diffraction gratings  Errors  Etching  
Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Mi, X.;  H. Yu;  H. Yu;  X. Qi;  X. Li and Q. Wan
Adobe PDF(3436Kb)  |  收藏  |  浏览/下载：335/116  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：267/76  |  提交时间：2018/06/13
Online detection of profile deviation for nano precision 2-D stage mirror 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 9
作者:  Liu, Z.-W.;  W.-H. Li;  J.-K. Wang;  S. Jiang;  Y. Song;  M.-Z. Pan and Bayanheshig
Adobe PDF(624Kb)  |  收藏  |  浏览/下载：302/84  |  提交时间：2017/09/11
Precision analysis of grating replicated mosaic error based on the principle of fraunhofer 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 5
作者:  Lu, Y.;  X. Qi;  H. Yu;  X. Li;  S. Zhang;  S. Jiang and L. Yin
Adobe PDF(1613Kb)  |  收藏  |  浏览/下载：310/100  |  提交时间：2017/09/11
Development and error compensation of the high precision turntable 期刊论文
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2016, 卷号: 37, 期号: 5
作者:  Yao, X.;  C. Sun;  J. Yang;  L. Yin and H. Zhao
Adobe PDF(1139Kb)  |  收藏  |  浏览/下载：381/131  |  提交时间：2017/09/11
Active control technology to correct the quality of the grating wave-front 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 1
作者:  Yang, C.;  H. Yu;  S. Zhang;  H. Yu;  X. Li and Y. Tang
Adobe PDF(1479Kb)  |  收藏  |  浏览/下载：351/104  |  提交时间：2016/08/24
Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 4
作者:  Song, N.;  S. Feng;  H. Yu;  X. Qi;  Bayanheshig and Y. Tang
Adobe PDF(1451Kb)  |  收藏  |  浏览/下载：322/64  |  提交时间：2016/08/24
Design of a varied-line-space plane grating in EUV spectrum 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2015, 卷号: 35, 期号: 1
作者:  Jiang, Y.;  Bayanheshig;  S. Yang;  X. Zhao;  W. Li and N. Wu
Adobe PDF(1560Kb)  |  收藏  |  浏览/下载：356/97  |  提交时间：2016/08/24