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Simple and compact grating-based heterodyne interferometer with the Littrow configuration for high-accuracy and long-range measurement of two-dimensional displacement 期刊论文
APPLIED OPTICS, 2018, 卷号: 57, 期号: 31, 页码: 9455-9463
作者:  Lv, Qiang;  Liu, Zhaowu;  Wang, Wei;  Li, Xiaotian;  Li, Shuo;  Song, Ying;  Yu, Hongzhu;  Bayanheshig;  Li, Wenhao
Adobe PDF(1611Kb)  |  收藏  |  浏览/下载:397/112  |  提交时间:2019/08/26
laser  nonlinearity  encoder  errors  stage  Optics  
Three-step random phase retrieval approach based on difference map normalization and diamond diagonal vector normalization 期刊论文
OPTICS EXPRESS, 2018, 卷号: 26, 期号: 22, 页码: 29170-29182
作者:  Zhang, Yu;  Tian, Xiaobo;  Liang, Rongguang
Adobe PDF(4270Kb)  |  收藏  |  浏览/下载:352/130  |  提交时间:2019/08/26
principal component analysis  wave-front reconstruction  testing  optical-surfaces  shifting interferometry  iterative algorithm  extraction  interferograms  vibration  errors  steps  Optics