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A general method of designing phase-shifting algorithms for grating lateral shearing interferometry 期刊论文
Frontiers of Information Technology & Electronic Engineering, 2018, 卷号: 19, 期号: 6, 页码: 809-814
作者:  Fang, C.;  Xiang, Y.;  Qi, K. Q.
浏览  |  Adobe PDF(421Kb)  |  收藏  |  浏览/下载:285/92  |  提交时间:2019/09/17
Interferometry  Phase measurement  Phase-shifting algorithms  point-diffraction interferometer  wave-front reconstruction  hartmann-shack sensor  spatial-resolution  metrology  optics  euva  Computer Science  Engineering  
Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer 期刊论文
Optics Express, 2018, 卷号: 26, 期号: 11, 页码: 14267-14277
作者:  Zhang, L.;  Qi, K. Q.;  Xiang, Y.
浏览  |  Adobe PDF(2930Kb)  |  收藏  |  浏览/下载:217/88  |  提交时间:2019/09/17
spherical surfaces  absolute  deviation  metrology  flat  maps  Optics  
Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2018, 卷号: 45, 期号: 8
作者:  Zhang, Lu;  Xiang, Yang
浏览  |  Adobe PDF(685Kb)  |  收藏  |  浏览/下载:250/102  |  提交时间:2019/09/17
Shearing  Aberrations  Errors  Interferometers  Measurement  Wavefronts