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Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Mi, X.;  H. Yu;  H. Yu;  X. Qi;  X. Li and Q. Wan
浏览  |  Adobe PDF(3436Kb)  |  收藏  |  浏览/下载：338/117  |  提交时间：2018/06/13
Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7
作者:  Wang, W.;  Bayanheshig;  M. Pan;  Y. Song and W. Li
浏览  |  Adobe PDF(993Kb)  |  收藏  |  浏览/下载：274/81  |  提交时间：2018/06/13
Active control technology to correct the quality of the grating wave-front 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 1
作者:  Yang, C.;  H. Yu;  S. Zhang;  H. Yu;  X. Li and Y. Tang
浏览  |  Adobe PDF(1479Kb)  |  收藏  |  浏览/下载：352/104  |  提交时间：2016/08/24
Design and analysis of diamond carrier aerostatic guideway in large diffraction grating ruling engine 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 4
作者:  Song, N.;  S. Feng;  H. Yu;  X. Qi;  Bayanheshig and Y. Tang
浏览  |  Adobe PDF(1451Kb)  |  收藏  |  浏览/下载：324/65  |  提交时间：2016/08/24
Yaw angle correction of grating line based on single piezoelectric actuator 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 8, 页码: 2039-2046
作者:  Li X.-T.;  Qi X.-D.;  Yu H.-L.;  Gao J.-X.;  Feng S.-L.;  Bayanheshig
浏览  |  Adobe PDF(1572Kb)  |  收藏  |  浏览/下载：298/79  |  提交时间：2015/04/24
Mechanism of frictional chatter during mechanical ruling grating 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 11, 页码: 3061-3066
作者:  Shi G.-F.;  L Y.-Y.;  Shi G.-Q.;  Jiri G.;  Xiao W.
浏览  |  Adobe PDF(1426Kb)  |  收藏  |  浏览/下载：265/74  |  提交时间：2015/04/24
Influence of running accuracy of ruling carriage system on grating spectrum performance 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2014, 卷号: 22, 期号: 10, 页码: 2674-2682
作者:  Yang C.;  Yu H.-L.;  Feng S.-L.;  Li X.-T.;  Qi X.-D.;  Jiang S.;  Tang Y.-G.
浏览  |  Adobe PDF(1639Kb)  |  收藏  |  浏览/下载：329/115  |  提交时间：2015/04/24