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Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time 期刊论文
Optics Communications, 2018, 卷号: 420, 页码: 122-126
作者:  Yang, C.;  Li, Y. H.;  Xue, C. X.;  Li, X. T.;  Yu, H. L.
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Diffraction grating  Phase measurement  System design  Grating wavefront  interferometric control  diffraction  resolution  carriage  Optics