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Surface topography measurement of microstructures near the lateral resolution limit via coherence scanning interferometry 期刊论文
Optics and Lasers in Engineering, 2022, 卷号: 152, 页码: 10
作者:  Y. F. Sun;  Z. S. Gao;  J. Q. Ma;  J. T. Zhou;  P. F. Xie;  L. J. Wang;  L. H. Lei;  Y. X. Fu;  Z. Y. Guo and Q. Yuan
浏览  |  Adobe PDF(4683Kb)  |  收藏  |  浏览/下载：108/55  |  提交时间：2023/06/14
Separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with the same diffraction order and different incident angles 期刊论文
Optics and Lasers in Engineering, 2021, 卷号: 139
作者:  G. Yang;  X. Qi;  X. Mi;  S. Zhang;  H. Yu;  H. Yu and X. Li
浏览  |  Adobe PDF(1291Kb)  |  收藏  |  浏览/下载：90/26  |  提交时间：2022/06/13