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Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront 期刊论文
Optics and Laser Technology, 2019, 卷号: 119, 页码: 6
作者:  X.T.Mi;  S.W.Zhang;  X.D.Qi;  H.Z.Yu;  J.X.Zhou;  S.B.Jiang
浏览  |  Adobe PDF(1452Kb)  |  收藏  |  浏览/下载：232/77  |  提交时间：2020/08/24
Gratings,Metal film thickness non-uniformity,Grating diffraction,wavefront error,echelle gratings,error,resolution,Optics,Physics  
Reducing machine-ruling grating wavefront value by compensating grating substrate surface error in real time 期刊论文
Optics Communications, 2018, 卷号: 420, 页码: 122-126
作者:  Yang, C.;  Li, Y. H.;  Xue, C. X.;  Li, X. T.;  Yu, H. L.
浏览  |  Adobe PDF(1477Kb)  |  收藏  |  浏览/下载：396/154  |  提交时间：2019/09/17
Diffraction grating  Phase measurement  System design  Grating wavefront  interferometric control  diffraction  resolution  carriage  Optics