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Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage 期刊论文
International Journal of Control Automation and Systems, 2022, 卷号: 20, 期号: 3, 页码: 741-749
作者:  M. S. Cao;  Y. M. Bo and H. B. Gao
Adobe PDF(1509Kb)  |  收藏  |  浏览/下载:67/22  |  提交时间:2023/06/14
Combined Feedforward Control and Disturbance Rejection Control Design for a Wafer Stage: A Data-Driven Approach Based on Iterative Parameter Tuning 期刊论文
Ieee Access, 2020, 卷号: 8, 页码: 181224-181232
作者:  M. S. Cao,Y. M. Bo and H. B. Gao
Adobe PDF(6565Kb)  |  收藏  |  浏览/下载:92/23  |  提交时间:2021/07/06