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Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films 期刊论文
Coatings, 2023, 卷号: 13, 期号: 2, 页码: 14
作者:  Y. Wang, T. Gehring, Q. H. Jin, J. Dycke and R. Kling
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