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Design of large aperture ultraviolet optical system for ultraviolet camera 期刊论文
Chinese Optics, 2018, 卷号: 11, 期号: 2, 页码: 212-218
作者:  Cui, Mu-Han;  Tian, Zhi-Hui;  Zhou, Yue;  Zhang, Ming-Chao;  Chen, Xue;  Li, Jia-Qi;  Yi, Xiang-Yu
Adobe PDF(1492Kb)  |  收藏  |  浏览/下载:390/117  |  提交时间:2019/09/17
Optical systems  Aberrations  Calcium fluoride  Cameras  Electric corona  Energy utilization  Fits and tolerances  Fluorine compounds  Fluorspar  Fused silica  Lenses  
Detection system of multilayer coating microstructure defects based on differential interference contrast confocal microscopy 期刊论文
Chinese Optics, 2018, 卷号: 11, 期号: 2, 页码: 255-264
作者:  Dai, Cen;  Gong, Yan;  Zhang, Hao;  Li, Dian-Meng;  Xue, Jin-Lai
Adobe PDF(2558Kb)  |  收藏  |  浏览/下载:338/111  |  提交时间:2019/09/17
Multilayers  Coatings  Confocal microscopy  Defects  Diffraction  Extreme ultraviolet lithography  Microstructure