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| 狭缝柔性结构的光学元件超精密调节机构研究 期刊论文 中国科学院长春光学精密机械与物理研究所, 2016, 期号: 6 作者: 董世则 收藏  |  浏览/下载:289/0  |  提交时间:2017/09/17 狭缝柔性结构 光刻物镜 调节机构 导向精度 精度测试 |
| Online detection of profile deviation for nano precision 2-D stage mirror 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 9 作者: Liu, Z.-W.; W.-H. Li; J.-K. Wang; S. Jiang; Y. Song; M.-Z. Pan and Bayanheshig 浏览  |  Adobe PDF(624Kb)  |  收藏  |  浏览/下载:333/111  |  提交时间:2017/09/11 |
| Optical design of high-numerical aperture lithographic lenses 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 4 作者: Xu, M.-F.; W.-B. Pang; X.-R. Xu; X.-H. Wang and W. Huang 浏览  |  Adobe PDF(487Kb)  |  收藏  |  浏览/下载:341/101  |  提交时间:2017/09/11 |
| Compensation effect of radial preload on mirror deformation caused by gravity 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2016, 卷号: 36, 期号: 4 作者: Jia, S.; W. Huang; X. Xu and C. Yao 浏览  |  Adobe PDF(1812Kb)  |  收藏  |  浏览/下载:359/151  |  提交时间:2017/09/11 |
| Sub-nanometer precision optical fabrication of CaF2materials 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 11 作者: Zhang, C.-L.; L. Xu; J. Liu; Z.-L. Ma; F. Wang; Y.-Q. Gu; L. Dai and S.-J. Peng 浏览  |  Adobe PDF(752Kb)  |  收藏  |  浏览/下载:454/130  |  提交时间:2017/09/11 |
| Effect of alignment errors of reticle on distortion in lithographic projection lens 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 3 作者: Yang, W.; W. Huang and H.-B. Shang 浏览  |  Adobe PDF(1721Kb)  |  收藏  |  浏览/下载:319/93  |  提交时间:2017/09/11 |
| Research on temperature distribution of deep ultraviolet lithographic projection objective 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 5 作者: Yao, C. and Y. Gong 浏览  |  Adobe PDF(8729Kb)  |  收藏  |  浏览/下载:303/119  |  提交时间:2017/09/11 |
| Research on deformation and aberration of active plate used in lithographic objective 期刊论文 Guangxue Xuebao/Acta Optica Sinica, 2016, 卷号: 36, 期号: 4 作者: Yao, C. and Y. Gong 浏览  |  Adobe PDF(1605Kb)  |  收藏  |  浏览/下载:253/56  |  提交时间:2017/09/11 |
| Forward kinematics of 3-RRR flexure parallel mechanism used in lens micro-adjustment 期刊论文 Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 6 作者: Zhao, L.; C. Liang; D.-F. Zhang; L.-J. Dong and H.-F. Peng 浏览  |  Adobe PDF(762Kb)  |  收藏  |  浏览/下载:339/97  |  提交时间:2017/09/11 |