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Impact of carbon contamination cleaning technologies on reflectivity of extreme ultraviolet lithography optics 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 3
作者:  Wang, Y.;  Q. Lu and Y. Gao
Adobe PDF(284Kb)  |  收藏  |  浏览/下载:373/116  |  提交时间:2018/06/13
Beam homogenized shaping and speckle suppression in laser projection display system using liquid crystal on silicon 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:  Liang, C.;  W. Zhang;  D. Rui;  Y. Sui and H. Yang
Adobe PDF(1806Kb)  |  收藏  |  浏览/下载:369/129  |  提交时间:2017/09/11