Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| AlGaN-Based Self-Powered Solar-Blind UV Focal Plane Array Imaging Photosensors: Material Growth, Device Preparation, and Functional Verification | |
| Y. Chen, X. Fan, Z. Zhang, G. Miao, H. Jiang and H. Song | |
| 2023 | |
| 发表期刊 | IEEE Sensors Journal
 |
| ISSN | 1530437X |
| 卷号 | 23期号:18页码:20536-20542 |
| 摘要 | This article reports the development of hybrid AlGaN-based self-powered solar-blind ultraviolet (UV) focal plane array (FPA) imaging photosensors from material growth and array preparation to functional verification. The detailed process starts with the epitaxial growth by metal-organic chemical vapor deposition (MOCVD). A high-quality AlN template is obtained on the 2-in double-polished c-plane sapphire substrate by introducing a mesothermal AlN (MT-AlN) interlayer and adjusting the growth rate of the high-temperature AlN epilayer (HT-AlN). Then, a polarization-enhanced p-i-n structure photodetector material is grown on the AlN template. Subsequently, based on the p-i-n structural material, a 320×256 back-illuminated solar-blind photodiode array is fabricated and hybridized to a matching Si-based CMOS readout integrated circuit (ROIC) chip to form a focal plane detector. Solar-blind UV detection is observed throughout the array in the 262-281-nm spectral region with a peak external quantum efficiency (EQE) of 65.3% at zero-bias voltage (no antireflection coating) and a nanosecond transient response time at a reverse bias of 5 V. The visible response of the ROIC is eliminated by developing a masking technology that is opaque to visible light, which enables the focal plane detector to achieve a high UV/visible rejection ratio of more than 104. © 2001-2012 IEEE. |
| DOI | 10.1109/JSEN.2023.3253724 |
| URL | 查看原文 |
| 收录类别 | sci ; ei |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/68564 |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Y. Chen, X. Fan, Z. Zhang, G. Miao, H. Jiang and H. Song. AlGaN-Based Self-Powered Solar-Blind UV Focal Plane Array Imaging Photosensors: Material Growth, Device Preparation, and Functional Verification[J]. IEEE Sensors Journal,2023,23(18):20536-20542. |
| APA | Y. Chen, X. Fan, Z. Zhang, G. Miao, H. Jiang and H. Song.(2023).AlGaN-Based Self-Powered Solar-Blind UV Focal Plane Array Imaging Photosensors: Material Growth, Device Preparation, and Functional Verification.IEEE Sensors Journal,23(18),20536-20542. |
| MLA | Y. Chen, X. Fan, Z. Zhang, G. Miao, H. Jiang and H. Song."AlGaN-Based Self-Powered Solar-Blind UV Focal Plane Array Imaging Photosensors: Material Growth, Device Preparation, and Functional Verification".IEEE Sensors Journal 23.18(2023):20536-20542. |
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