Electrically pumped optomechanical beam GaN-LED accelerometer based on the quantum-confined Stark effect

doi:10.1364/PRJ.490145

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	Electrically pumped optomechanical beam GaN-LED accelerometer based on the quantum-confined Stark effect
	G. Zhu, X. Ji, Z. Zhang, X. Yan, Y. Yang, F. Qin, X. Li, J. Wu, X. Sun, J. Yang and Y. Wang
	2023
发表期刊	Photonics Research
ISSN	23279125
卷号	11 期号:9 页码:1583-1591
摘要	Micro-nano optomechanical accelerometers are widely used in automobile, aerospace, and other industrial applications. Here, we fabricate mechanical sensing components based on an electrically pumped GaN light-emitting diode (LED) with a beam structure. The relationship between the blueshift of the electroluminescence (EL) spectra and the deformation of the GaN beam structure based on the quantum-confined Stark effect (QCSE) of the InGaN quantum well (QW) structure is studied by introducing an extra mass block. Under the equivalent acceleration condition, in addition to the elastic deformation of GaN-LED, a direct relationship exists between the LED’s spectral shift and the acceleration’s magnitude. The extra mass block (gravitational force: 7.55 × 10−11 N) induced blueshift of the EL spectra is obtained and shows driven current dependency. A polymer sphere (PS; gravitational force: 3.427 × 10−12 N) is placed at the center of the beam GaN-LED, and a blueshift of 0.061 nm is observed in the EL spectrum under the injection current of 0.5 mA. The maximum sensitivity of the acceleration is measured to be 0.02 m∕s2, and the maximum measurable acceleration is calculated to be 1.8 × 106 m∕s2. It indicates the simultaneous realization of high sensitivity and a broad acceleration measurement range. This work is significant for several applications, including light force measurement and inertial navigation systems with high integration ability. Journal © 2023 Chinese Laser Press.
DOI	10.1364/PRJ.490145
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收录类别	sci ; ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/68275
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	G. Zhu, X. Ji, Z. Zhang, X. Yan, Y. Yang, F. Qin, X. Li, J. Wu, X. Sun, J. Yang and Y. Wang. Electrically pumped optomechanical beam GaN-LED accelerometer based on the quantum-confined Stark effect[J]. Photonics Research,2023,11(9):1583-1591.
APA	G. Zhu, X. Ji, Z. Zhang, X. Yan, Y. Yang, F. Qin, X. Li, J. Wu, X. Sun, J. Yang and Y. Wang.(2023).Electrically pumped optomechanical beam GaN-LED accelerometer based on the quantum-confined Stark effect.Photonics Research,11(9),1583-1591.
MLA	G. Zhu, X. Ji, Z. Zhang, X. Yan, Y. Yang, F. Qin, X. Li, J. Wu, X. Sun, J. Yang and Y. Wang."Electrically pumped optomechanical beam GaN-LED accelerometer based on the quantum-confined Stark effect".Photonics Research 11.9(2023):1583-1591.

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