中国科学院长春光学精密机械与物理研究所

QQ客服 官方微博 反馈留言

	One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering
	X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu
	2023
发表期刊	Materials Today Physics
ISSN	25425293
卷号	35
摘要	Chip-scale lithium niobate (LN) yields a competitive candidate for terahertz (THz) on-chip communications, which could enable high-rate data transmission, non-invasive biosensing, and cloud-based technologies. However, it remains a key challenge to reach such goals to fabricate functional millimeter-scale crack-free THz microstructures on chip-scale LN, especially for industrial use. Here, we propose a one-step crack-free microstructure fabrication approach using dispersion-engineered femtosecond laser pulses without involving any postprocessing method. By laser dispersion engineering, the fabricated one-dimensional photonic crystal can improve the THz transmittance by about 5.8 times compared to the general case. This achievement is based on a thorough investigation into the influence of femtosecond laser temporal dispersion on the lithium niobite machining process. Our findings may further promote the development and industrial applications of LN-based photonics and optoelectronics, especially for chip-scale THz devices, as well as offer insights into the realization of precision machining of other forms of hard and brittle materials. © 2023 Elsevier Ltd
DOI	10.1016/j.mtphys.2023.101102
URL	查看原文
收录类别	ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/68271
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu. One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering[J]. Materials Today Physics,2023,35.
APA	X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu.(2023).One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering.Materials Today Physics,35.
MLA	X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu."One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering".Materials Today Physics 35(2023).

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
One-step precise mac（3925KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览 下载

个性服务

推荐该条目

保存到收藏夹

查看访问统计

导出为Endnote文件

谷歌学术

谷歌学术中相似的文章

[X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu]的文章

百度学术

百度学术中相似的文章

[X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu]的文章

必应学术

必应学术中相似的文章

[X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu]的文章

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。