CIOMP OpenIR
One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering
X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu
2023
Source PublicationMaterials Today Physics
ISSN25425293
Volume35
AbstractChip-scale lithium niobate (LN) yields a competitive candidate for terahertz (THz) on-chip communications, which could enable high-rate data transmission, non-invasive biosensing, and cloud-based technologies. However, it remains a key challenge to reach such goals to fabricate functional millimeter-scale crack-free THz microstructures on chip-scale LN, especially for industrial use. Here, we propose a one-step crack-free microstructure fabrication approach using dispersion-engineered femtosecond laser pulses without involving any postprocessing method. By laser dispersion engineering, the fabricated one-dimensional photonic crystal can improve the THz transmittance by about 5.8 times compared to the general case. This achievement is based on a thorough investigation into the influence of femtosecond laser temporal dispersion on the lithium niobite machining process. Our findings may further promote the development and industrial applications of LN-based photonics and optoelectronics, especially for chip-scale THz devices, as well as offer insights into the realization of precision machining of other forms of hard and brittle materials. © 2023 Elsevier Ltd
DOI10.1016/j.mtphys.2023.101102
URL查看原文
Indexed Byei
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/68271
Collection中国科学院长春光学精密机械与物理研究所
Recommended Citation
GB/T 7714
X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu. One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering[J]. Materials Today Physics,2023,35.
APA X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu.(2023).One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering.Materials Today Physics,35.
MLA X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu."One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering".Materials Today Physics 35(2023).
Files in This Item: Download All
File Name/Size DocType Version Access License
One-step precise mac(3925KB)期刊论文出版稿开放获取CC BY-NC-SAView Download
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu]'s Articles
Baidu academic
Similar articles in Baidu academic
[X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.