One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering

doi:10.1016/j.mtphys.2023.101102

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	One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering
	X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu
	2023
Source Publication	Materials Today Physics
ISSN	25425293
Volume	35
Abstract	Chip-scale lithium niobate (LN) yields a competitive candidate for terahertz (THz) on-chip communications, which could enable high-rate data transmission, non-invasive biosensing, and cloud-based technologies. However, it remains a key challenge to reach such goals to fabricate functional millimeter-scale crack-free THz microstructures on chip-scale LN, especially for industrial use. Here, we propose a one-step crack-free microstructure fabrication approach using dispersion-engineered femtosecond laser pulses without involving any postprocessing method. By laser dispersion engineering, the fabricated one-dimensional photonic crystal can improve the THz transmittance by about 5.8 times compared to the general case. This achievement is based on a thorough investigation into the influence of femtosecond laser temporal dispersion on the lithium niobite machining process. Our findings may further promote the development and industrial applications of LN-based photonics and optoelectronics, especially for chip-scale THz devices, as well as offer insights into the realization of precision machining of other forms of hard and brittle materials. © 2023 Elsevier Ltd
DOI	10.1016/j.mtphys.2023.101102
URL	查看原文
Indexed By	ei
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Document Type	期刊论文
Identifier	http://ir.ciomp.ac.cn/handle/181722/68271
Collection	中国科学院长春光学精密机械与物理研究所
Recommended Citation GB/T 7714	X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu. One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering[J]. Materials Today Physics,2023,35.
APA	X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu.(2023).One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering.Materials Today Physics,35.
MLA	X. Zhou, Y. Lu, H. Liu, Q. Wu, X. Xu, L. Chen, Z. Li, R. Wang, J. Guo and J. Xu."One-step precise machining of terahertz microstructures on chip-scale lithium niobate via laser dispersion engineering".Materials Today Physics 35(2023).

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中国科学院长春光学精密机械与物理研究所