Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions

doi:10.1021/acsami.3c04953

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	Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions
	Y. Zhao, G. Chen, Y. Zhao, M. Li, N. Zhang, J. Wen, N. Zhou, S. Li, H. Mao and C. Huang
	2023
发表期刊	ACS Applied Materials and Interfaces
ISSN	19448244
卷号	15 期号:25 页码:30793-30803
摘要	High-performance flexible sensors are essential for real-time information analysis and constructing noncontact communication modules for emerging human-machine interactions. In these applications, batch fabrication of sensors that exhibit high performance at the wafer level is in high demand. Here, we present organic nanoforest-based humidity sensor (NFHS) arrays on a 6 in. flexible substrate prepared via a facile, cost-effective manufacturing approach. Such an NFHS achieves state-of-the-art overall performance: high sensitivity and fast recovery time; the best properties are at a small device footprint. The high sensitivity (8.84 pF/% RH) and fast response time (5 s) of the as-fabricated organic nanoforests are attributed to the abundant hydrophilic groups, the ultra-large surface area with a huge number of nanopores, and the vertically distributed structures beneficial to the transfer of molecules up and down. The NFHS also exhibits excellent long-term stability (90 days), superior mechanical flexibility, and good performance repeatability after bending. With these superiorities, the NFHS is further applied as a smart noncontact switch, and the NFHS array is used as the motion trajectory tracker. The wafer-level batch fabrication capability of our NFHS provides a potential strategy for developing practical applications of such humidity sensors. © 2023 American Chemical Society
DOI	10.1021/acsami.3c04953
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收录类别	sci ; ei
引用统计	被引频次：5[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/68246
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Zhao, G. Chen, Y. Zhao, M. Li, N. Zhang, J. Wen, N. Zhou, S. Li, H. Mao and C. Huang. Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions[J]. ACS Applied Materials and Interfaces,2023,15(25):30793-30803.
APA	Y. Zhao, G. Chen, Y. Zhao, M. Li, N. Zhang, J. Wen, N. Zhou, S. Li, H. Mao and C. Huang.(2023).Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions.ACS Applied Materials and Interfaces,15(25),30793-30803.
MLA	Y. Zhao, G. Chen, Y. Zhao, M. Li, N. Zhang, J. Wen, N. Zhou, S. Li, H. Mao and C. Huang."Wafer-Level, High-Performance, Flexible Sensors Based on Organic Nanoforests for Human-Machine Interactions".ACS Applied Materials and Interfaces 15.25(2023):30793-30803.

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