Parameter Optimization of RB-SiC Polishing by Femtosecond Laser

doi:10.3390/ma16041582

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	Parameter Optimization of RB-SiC Polishing by Femtosecond Laser
	T. Yang, C. Liu, T. Chen, M. Shao, C. Jiang, C. Lu and S. Song
	2023
发表期刊	Materials
ISSN	19961944
卷号	16 期号:4
摘要	Reaction-boned silicon carbide (RB-SiC) is considered a new material for large lightweight ground-based space telescopes due to its high specific stiffness, low thermal deformation, and excellent optical quality. The excellent mechanical properties of RB-SiC result in the low efficiency of traditional polishing and mechanical polishing. In this paper, a polishing method for RB-SiC based on a femtosecond laser is proposed to improve surface quality. A theoretical heat conduction model was established in the process of femtosecond laser irradiation of SiC. We analyzed the ablation type and calculated the single-pulse ablation threshold of SiC, which verified the feasibility of femtosecond laser polishing. Further, the effects of polishing parameters on the polished surface quality were analyzed by a series of experiments, and the optimal parameters were selected. It was observed to improve polishing efficiency and can replace the intermediate steps of traditional mechanical polishing. © 2023 by the authors.
DOI	10.3390/ma16041582
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收录类别	sci ; ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/68089
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	T. Yang, C. Liu, T. Chen, M. Shao, C. Jiang, C. Lu and S. Song. Parameter Optimization of RB-SiC Polishing by Femtosecond Laser[J]. Materials,2023,16(4).
APA	T. Yang, C. Liu, T. Chen, M. Shao, C. Jiang, C. Lu and S. Song.(2023).Parameter Optimization of RB-SiC Polishing by Femtosecond Laser.Materials,16(4).
MLA	T. Yang, C. Liu, T. Chen, M. Shao, C. Jiang, C. Lu and S. Song."Parameter Optimization of RB-SiC Polishing by Femtosecond Laser".Materials 16.4(2023).

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