Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| A MEMS Thermopile Pirani Sensor Integrated with Composite Nanoforests for Vacuum Monitoring in Semiconductor Equipment | |
| S. Xu, M. Shi, R. Huang, C. Zhang, S. Li, C. Huang, N. Zhou and H. Mao | |
| 2023 | |
| 发表期刊 | IEEE Transactions on Electron Devices
 |
| ISSN | 00189383 |
| 卷号 | 70期号:10页码:5300-5305 |
| 摘要 | In this work, a novel MEMS thermopile Pirani sensor integrated with composite nanoforests (CNFs) is presented. As the CNFs have high porosity and a large surface area to volume ratio (SVR), such a sensor possesses enlarged gas heat conduction. Besides, the surface plasmon resonance (SPR) introduced by the CNFs increases light absorption of the sensor, and the enhanced electromagnetic field of the SPR can effectively convert optical energy into heat energy. Compared with the pristine Pirani sensor without such CNFs, the output voltage of this novel sensor is increased by up to 70.9%, the low detection limit (LDL) of pressure is extended by 300%, and its maximum sensitivity is improved by 68.1%. With these superiorities, the as-prepared Pirani sensor can successfully monitor the vacuum information of different semiconductor manufacturing equipments. Backed up by the CMOS-compatible preparation process of the device, a promising future with diverse scenarios for practical applications is expected. © 1963-2012 IEEE. |
| DOI | 10.1109/TED.2023.3306318 |
| URL | 查看原文 |
| 收录类别 | sci ; ei |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/68062 |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | S. Xu, M. Shi, R. Huang, C. Zhang, S. Li, C. Huang, N. Zhou and H. Mao. A MEMS Thermopile Pirani Sensor Integrated with Composite Nanoforests for Vacuum Monitoring in Semiconductor Equipment[J]. IEEE Transactions on Electron Devices,2023,70(10):5300-5305. |
| APA | S. Xu, M. Shi, R. Huang, C. Zhang, S. Li, C. Huang, N. Zhou and H. Mao.(2023).A MEMS Thermopile Pirani Sensor Integrated with Composite Nanoforests for Vacuum Monitoring in Semiconductor Equipment.IEEE Transactions on Electron Devices,70(10),5300-5305. |
| MLA | S. Xu, M. Shi, R. Huang, C. Zhang, S. Li, C. Huang, N. Zhou and H. Mao."A MEMS Thermopile Pirani Sensor Integrated with Composite Nanoforests for Vacuum Monitoring in Semiconductor Equipment".IEEE Transactions on Electron Devices 70.10(2023):5300-5305. |
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| A MEMS Thermopile Pi（5803KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 | |
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