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Mixed compensation for the testing of large convex aspheres
X. K. Wang, Z. K. Liu, H. Su, Q. Cheng, L. Z. Li, F. K. Li, W. Y. Li, B. Liu, J. Wang, M. X. Cai, J. C. Wang, W. H. Li, L. J. Zhang, Q. Wu, X. Luo and X. J. Zhang
2023
发表期刊Results in Physics
ISSN2211-3797
卷号55页码:9
摘要Since the testing of convex mirrors often requires a compensator with a larger aperture than the mirror under test, this is undoubtedly a trade-off not worth pursuing. Moreover, for surfaces with higher levels of asphericity, it further escalates the challenges in testing. In this study, high-accuracy testing of large convex aspheric surfaces with rotary symmetry was achieved via a method that combines sub-aperture stitching and Computer-Generated Holograms (CGH) compensation testing. Applying the methodology outlined in this study, practical testing was conducted on a large-aperture convex aspheric mirror with a diameter of 538 mm. The outcomes demonstrated that the center testing data and the outer ring testing data were stitched by the stitching algorithm to obtain the surface error of the full-aperture. The results were compared to those of Luphoscan and compensation testing, with a residual Root Mean Square (RMS) less than lambda/20 (lambda = 632.8 nm). Finally, the error analysis of the entire testing process showed that the accuracy was better than lambda/50. The results demonstrate that the method can achieve highly accurate test of large convex aspheric surfaces.
DOI10.1016/j.rinp.2023.107189
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收录类别sci
语种英语
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文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/67979
专题中国科学院长春光学精密机械与物理研究所
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GB/T 7714
X. K. Wang, Z. K. Liu, H. Su, Q. Cheng, L. Z. Li, F. K. Li, W. Y. Li, B. Liu, J. Wang, M. X. Cai, J. C. Wang, W. H. Li, L. J. Zhang, Q. Wu, X. Luo and X. J. Zhang. Mixed compensation for the testing of large convex aspheres[J]. Results in Physics,2023,55:9.
APA X. K. Wang, Z. K. Liu, H. Su, Q. Cheng, L. Z. Li, F. K. Li, W. Y. Li, B. Liu, J. Wang, M. X. Cai, J. C. Wang, W. H. Li, L. J. Zhang, Q. Wu, X. Luo and X. J. Zhang.(2023).Mixed compensation for the testing of large convex aspheres.Results in Physics,55,9.
MLA X. K. Wang, Z. K. Liu, H. Su, Q. Cheng, L. Z. Li, F. K. Li, W. Y. Li, B. Liu, J. Wang, M. X. Cai, J. C. Wang, W. H. Li, L. J. Zhang, Q. Wu, X. Luo and X. J. Zhang."Mixed compensation for the testing of large convex aspheres".Results in Physics 55(2023):9.
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