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	Design and assessment of a micro-nano positioning hexapod platform with flexure hinges for large aperture telescopes
	X. Wang, Y. Y, X. Z, H. C, S. J and W. J
	2023
发表期刊	Optics Express
ISSN	10944087
卷号	31期号:3页码:3908-3926
摘要	In order to compensate the optical system bias, which is caused by the change of elevation angle and thermal gradient during the optical alignment of the telescope, a novel high stiffness micro-nano positioning hexapod platform with flexure hinges is proposed in this paper. The novel flexure hinge has a mechanical limit, and its equivalent model is established and analyzed. In addition, in order to speed up the solution process, a novel simplified inverse kinematic model is developed based on the rigid body kinematic theory. Then, an effective rigid-flexible coupling simulation system is built to verify the correctness and applicability of the inverse kinematic model. Finally, a systematic experimental test method and a statistical-based data analysis theory are proposed. The experimental results show that the resolution and repeatability of translation and rotation and lateral stiffness are as follows: 0.3 mm and 0.5 arc sec, ± 0.5 μm and ±0.5 arc sec, 131.6N μm-1 and 133.0N μm-1. The proposed hexapod platform can be used to correct the optical system bias of large-aperture telescopes. © 2023 Optica Publishing Group.
DOI	10.1364/OE.476854
URL	查看原文
收录类别	sci ; ei
引用统计	被引频次：7[WOS]   [WOS记录]     [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67973
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Wang, Y. Y, X. Z, H. C, S. J and W. J. Design and assessment of a micro-nano positioning hexapod platform with flexure hinges for large aperture telescopes[J]. Optics Express,2023,31(3):3908-3926.
APA	X. Wang, Y. Y, X. Z, H. C, S. J and W. J.(2023).Design and assessment of a micro-nano positioning hexapod platform with flexure hinges for large aperture telescopes.Optics Express,31(3),3908-3926.
MLA	X. Wang, Y. Y, X. Z, H. C, S. J and W. J."Design and assessment of a micro-nano positioning hexapod platform with flexure hinges for large aperture telescopes".Optics Express 31.3(2023):3908-3926.

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