A Differential Confocal Sensor for Simultaneous Position and Slope Acquisitions Based on a Zero-Crossing Prediction Algorithm

doi:10.3390/s23031453

CIOMP OpenIR

	A Differential Confocal Sensor for Simultaneous Position and Slope Acquisitions Based on a Zero-Crossing Prediction Algorithm
	T. Wang, Z. Wang, Y. Yang, X. Mi, Y. Ti and J. Wang
	2023
发表期刊	Sensors
ISSN	14248220
卷号	23 期号:3
摘要	A new sensor type is proposed to accurately detect the surface profiles of three-dimensional (3D) free-form surfaces. This sensor is based on the single-exposure, zero-crossing method and is used to measure position and angle simultaneously. First, the field intensity distribution in the posterior focal plane of the confocal microscope’s objective was modeled accurately. Second, because the camera needs to trigger acquisition when the surface (to be measured) reaches the focal position of the sensor, a zero-crossing prediction method based on a sliding window was proposed. Third, a fast, spatially convergent, peak-extraction algorithm was proposed to improve the accuracy and efficiency of peak extraction. This scheme reduces system installation and adjustment difficulties, and the single-exposure, zero-crossing method achieves high-speed, real-time image acquisitions. The experimental results indicate that the average error of the zero-crossing prediction system was 17.63 nm, the average error of the tilt degree measurement was 0.011° in the range of 0–8°, and the prediction error of the tilt direction measurement was 0.089° in the range of 0–360°. The sensor can measure the slope and can be potentially used for 3D surface precision detection. © 2023 by the authors.
DOI	10.3390/s23031453
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收录类别	sci ; ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67962
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	T. Wang, Z. Wang, Y. Yang, X. Mi, Y. Ti and J. Wang. A Differential Confocal Sensor for Simultaneous Position and Slope Acquisitions Based on a Zero-Crossing Prediction Algorithm[J]. Sensors,2023,23(3).
APA	T. Wang, Z. Wang, Y. Yang, X. Mi, Y. Ti and J. Wang.(2023).A Differential Confocal Sensor for Simultaneous Position and Slope Acquisitions Based on a Zero-Crossing Prediction Algorithm.Sensors,23(3).
MLA	T. Wang, Z. Wang, Y. Yang, X. Mi, Y. Ti and J. Wang."A Differential Confocal Sensor for Simultaneous Position and Slope Acquisitions Based on a Zero-Crossing Prediction Algorithm".Sensors 23.3(2023).

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