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	Enhancement of crystalline quality and solar-blind photodetection characteristics of ε-Ga2O3 films by introducing Zn impurity
	X. Sun, K. W. Liu, X. Chen, Y. X. Zhu, Z. Cheng, J. L. Yang, B. H. Li, L. Liu and D. Z. Shen
	2023
发表期刊	Journal of Materials Chemistry C
ISSN	2050-7526
卷号	12期号:1页码:118-124
摘要	epsilon-Ga2O3 films with and without Zn impurity were epitaxially grown by metal organic chemical vapor deposition on a c-plane sapphire substrate, and were then face-to-face annealed in an oxygen atmosphere at 600 degrees C. The structural and photoelectric properties of the thin films were characterized and analyzed in detail. The Zn-doped epsilon-Ga2O3 photodetector exhibits an ultra-high specific detectivity of 1.7 x 10(16) Jones, a very quick response speed of less than 40 ms, and an extremely high UV-visible rejection ratio of 2.0 x 10(8) at a 10 V bias. In addition, the temperature dependent photoresponse properties have been investigated from 30 degrees C to 190 degrees C. The compensation effect of Zn impurities and their suppression of oxygen vacancies, as well as the improvement of crystal quality, should be responsible for the excellent performance of the device. Our results provide a new idea and guidance for achieving high-performance solar-blind photodetectors based on Ga2O3.
DOI	10.1039/d3tc03599a
URL	查看原文
收录类别	sci ; ei
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67871
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Sun, K. W. Liu, X. Chen, Y. X. Zhu, Z. Cheng, J. L. Yang, B. H. Li, L. Liu and D. Z. Shen. Enhancement of crystalline quality and solar-blind photodetection characteristics of ε-Ga2O3 films by introducing Zn impurity[J]. Journal of Materials Chemistry C,2023,12(1):118-124.
APA	X. Sun, K. W. Liu, X. Chen, Y. X. Zhu, Z. Cheng, J. L. Yang, B. H. Li, L. Liu and D. Z. Shen.(2023).Enhancement of crystalline quality and solar-blind photodetection characteristics of ε-Ga2O3 films by introducing Zn impurity.Journal of Materials Chemistry C,12(1),118-124.
MLA	X. Sun, K. W. Liu, X. Chen, Y. X. Zhu, Z. Cheng, J. L. Yang, B. H. Li, L. Liu and D. Z. Shen."Enhancement of crystalline quality and solar-blind photodetection characteristics of ε-Ga2O3 films by introducing Zn impurity".Journal of Materials Chemistry C 12.1(2023):118-124.

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